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Materials science in semiconductor processing

NLM Title Abbreviation:
Mater Sci Semicond Process
Title(s):
Materials science in semiconductor processing.
Continues In Part:
Solid-state electronics ISSN 0038-1101
Publication Start Year:
1998
Frequency:
Quarterly
Country of Publication:
England
Publisher:
Oxford ; New York : Pergamon, c1998-
Description:
v. : ill. ; 27 cm.
Language:
English
ISSN:
1369-8001 (Print)
1873-4081 (Electronic)
1369-8001 (Linking)
Coden:
MSSPFQ
LCCN:
00208229
sn 99038066
Electronic Links:
Access not provided by NLM
In:
PubMed: Selected citations only
Current Indexing Status:
Not currently indexed for MEDLINE. Citations are for articles where the manuscript was deposited in PubMed Central (PMC) in compliance with public access policies. For further information, see Author Manuscripts in PMC.
Notes:
Title from cover.
Available also by subscription via the World Wide Web.
Vol. 1, no. 1 and v. 1, no. 2 issued as separately numbered sections in v. 42, no. 5 and v. 42, no. 10 of: Solid-state electronics.
Other ID:
(OCoLC)39279731
Collection Status:
Not in the NLM Collection
NLM ID:
101628381 [Serial]

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