Suppressed Fin-LER Induced Variability in Negative Capacitance FinFETs

Lee, HP; Su, P

Su, P (reprint author), Natl Chiao Tung Univ, Inst Elect, Hsinchu 30010, Taiwan.

IEEE ELECTRON DEVICE LETTERS, 2017; 38 (10): 1492

Abstract

This letter investigates the impact of fin lineedge roughness (Fin-LER) on the intrinsic variation of negative capacitanceFinFETs (NC-FinFETs) by TCAD......

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