Ruthenium(II) MOCVD Precursors for Phosphorus-Doped Ruthenium Layer Formation

Preuss, A; Tamuliene, J; Madajska, K; Szymanska, IB; Korb, M; Ruffer, T; Jeschke, J; Melzer, M; Bankwitz, J; Schulz, SE; Lang, H

Lang, H (corresponding author), Tech Univ Chemnitz, Fac Nat Sci, Inst Chem, Inorgan Chem, D-09107 Chemnitz, Germany.; Lang, H (corresponding author), MAIN Res Ctr, Rosenbergstr 6, D-09126 Chemnitz, Germany.

EUROPEAN JOURNAL OF INORGANIC CHEMISTRY, 2020; 2020 (17): 1612

Abstract

The synthesis and solid-state structure of Ru(CO)(2)(PEt3)(2)(O2CR)(2) (4a-f, R = Me, Et, iPr, Bu-t, CH2OMe, CF3) is reported. The vapor pressure of 4......

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