Optical and structural characterization of Nb, Zr, Nb/Zr, Zr/Nb thin films on Si3N4 membranes windows

Jimenez, K; Gaballah, AEH; Ahmed, N; Zuppella, P; Nicolosi, P

Jimenez, K (reprint author), Univ Padua, Dept Informat Engn, Via Gradenigo 6B, I-35131 Padua, Italy.; Jimenez, K (reprint author), CNR, IFN UOS Padova, Via Trasea 7, I-35131 Padua, Italy.; Jimenez, K (reprint author), Univ Autonoma Santo Domingo, Santo Do

DAMAGE TO VUV, EUV, AND X-RAY OPTICS VI, 2017; 10236 ( ):

Abstract

High brilliance sources in the EUV spectral range such as Synchrotron and Free Electron Lasers (FEL) are widely used in multiple scientific and techno......

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