High-Performance 1-V ZnO Thin-Film Transistors With Ultrathin, ALD-Processed ZrO2 Gate Dielectric

Yang, J; Zhang, YP; Wu, QQ; Dussarrat, C; Qi, J; Zhu, WQ; Ding, XW; Zhang, JH

Ding, XW; Zhang, JH (reprint author), Shanghai Univ, Minist Educ, Key Lab Adv Display & Syst Applicat, Shanghai 200072, Peoples R China.

IEEE TRANSACTIONS ON ELECTRON DEVICES, 2019; 66 (8): 3382

Abstract

The high-performance ZnO thin-film transistors (TFTs) were fabricated on indium tin oxide glass with high-capacitance atomic layer deposition (ALD)-pr......

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