Hydrophilic Direct Bonding of MgO/MgO for High-Temperature MEMS Devices

Liu, J; Jia, PG; Li, JS; Feng, F; Liang, T; Liu, WY; Xiong, JJ

Xiong, JJ (corresponding author), North Univ China, Sci & Technol Elect Test & Measurement Lab, Taiyuan 030051, Peoples R China.

IEEE ACCESS, 2020; 8 (): 67242

Abstract

Single-crystalline magnesium oxide (MgO) is an attractive material of substrates for high-temperature devices and high-temperature superconducting fil......

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