Single-Mode Tapered Vertical SU-8 Waveguide Fabricated by E-Beam Lithography for Analyte Sensing

Xin, Y; Pandraud, G; Zhang, YM; French, P

Xin, Y (reprint author), State Key Lab NBC Protect Civilian, Beijing 102205, Peoples R China.; French, P (reprint author), Delft Univ Technol, EEMCS, NL-2628 CD Delft, Netherlands.

SENSORS, 2019; 19 (15):

Abstract

In this paper, we propose a novel vertical SU-8 waveguide for evanescent analyte sensing. The waveguide is designed to possess a vertical and narrow s......

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