GeSi APD with Ultralow Dark Currents for LiDAR

Na, N; Lu, YC; Liu, YH; Chen, PW; Lai, YC; Lin, YR; Lin, CC; Shia, T; Cheng, CH; Huang, PY; Wang, L; Chen, SL

Na, N (通讯作者)，Artilux Inc, Zhubei, Hsinchu, Taiwan.

2023 IEEE SILICON PHOTONICS CONFERENCE, SIPHOTONICS, 2023; ():

Abstract

We report the fabrication and characterization of a 50-mu m diameter GeSi avalanche photodiode (APD) in normal incidence configuration. The dark curre......

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