Scaling/LER study of Si GAA nanowire FET using 3D finite element Monte Carlo simulations

Elmessary, MA; Nagy, D; Aldegunde, M; Seoane, N; Indalecio, G; Lindberg, J; Dettmer, W; Peric, D; Garcia-Loureiro, AJ; Kalna, K

Elmessary, MA (reprint author), Swansea Univ, Coll Engn, ESDC, Swansea SA1 8EN, W Glam, Wales.

SOLID-STATE ELECTRONICS, 2017; 128 ( ): 17

Abstract

3D Finite Element (FE) Monte Carlo (MC) simulation toolbox incorporating 2D Schrodinger equation quantum corrections is employed to simulate I-D-V-G c......

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