Magnetic Tunnel Junctions: Laser Annealing Versus Oven Annealing

Sharma, A; Hoffmann, MA; Matthes, P; Kohler, N; Busse, S; Muller, M; Exner, H; Schulz, SE; Zahn, DRT; Salvan, G

Sharma, A (reprint author), Tech Univ Chemnitz, Semicond Phys, D-09126 Chemnitz, Germany.

IEEE TRANSACTIONS ON MAGNETICS, 2019; 55 (1):

Abstract

The performance of CoFeB/MgO tunnel junctions is strongly dependent on an annealing step at the end of the fabrication process to first, set a referen......

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