A reliability model for a wafer FAB

Jang, JS; Park, SC

Park, SC (reprint author), Ajou Univ, Dept Ind Engn, San 5, Suwon, South Korea.

COGENT ENGINEERING, 2017; 4 (1):

Abstract

Proposed in this paper is a new reliability model for a wafer fabrication plant (FAB). The reliability prediction of a FAB is essential for various ac......

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