A predictable smoothing evolution model for computer-controlled polishing

Hou, J; Lei, PL; Liu, SW; Chen, XH; Wang, J; Deng, WH; Zhong, B

Liu, SW (corresponding author), Harbin Inst Technol, Sch Mechatron & Engn, Harbin 150001, Peoples R China.

JOURNAL OF THE EUROPEAN OPTICAL SOCIETY-RAPID PUBLICATIONS, 2020; 16 (1):

Abstract

Quantitative prediction of the smoothing of mid-spatial frequency errors (MSFE) is urgently needed to realize process guidance for computer controlled......

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