Phase formation of cubic silicon carbide from reactive silicon-carbon multilayers

Shekhawat, D; Sudhahar, D; Döll, J; Grieseler, R; Pezoldt, J

Shekhawat, D; Pezoldt, J (通讯作者)，TU Ilmenau, Inst Mikro & Nanoelekt, FG Nanotechnol, Postfach 100565, D-98684 Ilmenau, Germany.;Shekhawat, D; Pezoldt, J (通讯作者)，TU Ilmenau, Inst Mikro & Nanotechnol MacroNano, Postfach 100565, D-98684 Ilmenau, Germany.;Shekhawat, D; Pezoldt, J (通讯作者)，TU Ilmenau, Inst Werkstofftechnik, Postfach 100565, D-98684 Ilmenau, Germany.

MRS ADVANCES, 2023; 8 (9): 494

Abstract

Silicon carbide layers were fabricated using self-propagating high-temperature synthesis of binary silicon-carbon based reactive multilayers. The sili......

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