Microelectrode Array With Transparent ALD TiN Electrodes

Ryynanen, T; Pelkonen, A; Grigoras, K; Ylivaara, OME; Hyvarinen, T; Ahopelto, J; Prunnila, M; Narkilahti, S; Lekkala, J

Ryynanen, T (reprint author), Tampere Univ, BioMediTech Inst, Micro & Nanosyst Res Grp, Tampere, Finland.; Ryynanen, T (reprint author), Tampere Univ, Fac Med & Hlth Technol, Tampere, Finland.; Grigoras, K (reprint author), VTT Tech Res Ctr Finland Ltd, E

FRONTIERS IN NEUROSCIENCE, 2019; 13 ():

Abstract

Low noise platinum black or sputtered titanium nitride (TiN) microelectrodes are typically used for recording electrical activity of neuronal or cardi......

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