CVD Polymers for Devices and Device Fabrication

Wang, MH; Wang, XX; Moni, P; Liu, AD; Kim, DH; Jo, WJ; Sojoudi, H; Gleason, KK

Gleason, KK (reprint author), MIT, Dept Chem Engn, 77 Massachusetts Ave, Cambridge, MA 02139 USA.

ADVANCED MATERIALS, 2017; 29 (11):

Abstract

Chemical vapor deposition (CVD) polymerization directly synthesizes organic thin films on a substrate from vapor phase reactants. Dielectric, semicond......

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