Effect of Homopolymer Concentration on LER and LWR in Block Copolymer/Homopolymer Blends

Breaux, CL; Delony, JB; Ludovice, PJ; Henderson, CL

Henderson, CL (reprint author), Univ S Florida, Tampa, FL 33620 USA.

NOVEL PATTERNING TECHNOLOGIES 2018, 2018; 10584 ():

Abstract

Block copolymers (BCPs) can phase separate to form periodic structures with small spacings on the order of the polymer molecular size, thus making BCP......

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