Bulk Si production from Si?Fe melts by directional-solidification, part II: Element distribution

Li, YQ; Lei, XH; Liu, CC; Zhang, LF

Zhang, LF (corresponding author), Yanshan Univ, Sch Mech Engn, State Key Lab Metastable Mat Sci & Technol, Qinhuangdao 066000, Hebei, Peoples R China.

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2021; 128 ():

Abstract

Bulk Si was grown from Si?Fe alloy using the directional-solidification technique. Some metal and oxide impurity particles, such as Fe?Si?Al and Si?Al......

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