Maximizing energy utilization in DMD-based projection lithography

Deng, MJ; Zhao, YY; Liang, ZX; Chen, JT; Zhang, Y; Duan, XM

Zhao, YY; Duan, XM (通讯作者)，Jinan Univ, Inst Photon Technol, Guangdong Prov Key Lab Opt Fiber Sensing & Commun, Guangzhou 511443, Peoples R China.

OPTICS EXPRESS, 2022; 30 (4): 4692

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