Unearthing [3-(Dimethylamino)propyl] aluminium(III) Complexes as Novel Atomic Layer Deposition (ALD) Precursors for Al2O3 : Synthesis, Characterization and ALD Process Development

Mai, L; Gebhard, M; de los Arcos, T; Giner, I; Mitschker, F; Winter, M; Parala, H; Awakowicz, P; Grundmeier, G; Devi, A

Devi, A (reprint author), Ruhr Univ Bochum, Inorgan Mat Chem, Univ Str 150, D-44801 Bochum, Germany.

CHEMISTRY-A EUROPEAN JOURNAL, 2017; 23 (45): 10768

Abstract

Identification and synthesis of intramolecularly donor-stabilized aluminium(III) complexes, which contain a 3-(dimethylamino)propyl (DMP) ligand, as n......

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