Evaluating Automated Guided Vehicle System Characteristics in Semiconductor Fab Automated Material Handling Systems

Reith, KB; Boden, P; Daumler, M; Rank, S; Schmidt, T; Hupfer, R

Reith, KB (reprint author), Tech Univ Dresden, Chair Mat Handling, Dresden, Germany.

2019 30TH ANNUAL SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE (ASMC), 2019; ():

Abstract

Using a fleet of automated guided vehicles (AGV) is an increasingly popular option for a transportation system in semiconductor fabrication plants (fa......

Full Text Link


Links

期刊讨论 | 中国SCI论文 | 期刊主页 | 投稿经验 | 杂志官网 | 投稿链接 | 作者需知 | PMC链接 | Pubmed全文检索