RF MEMS packaged switch evaluation tests up to 25GHz

Savin, EA; Bochkova, EN; Kirtaev, RV; Iannacci, J

Savin, EA (reprint author), Bazovye Tekhnol LLC, Moscow, Russia.

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2019; 25 (6): 2191

Abstract

This article presents the results of the series of experimental tests of a packaged RF MEMS switch manufactured as a chip on a silicon substrate in th......

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