ICP-CVD mu-Si Layers Optimization for Strain Gauges on Flexible Substrates

Castro, FG; de Sagazan, O; Coulon, N; Simon, C; Le Bihan, F

de Sagazan, O (corresponding author), Univ Rennes, IETR, CNRS, UMR 6164, F-35000 Rennes, France.

SENSORS AND ACTUATORS A-PHYSICAL, 2020; 315 ():

Abstract

Low Temperature mu-Si layers were performed in a Corial Inductively Coupled Plasma Chemical Vapour Deposition (ICP-CVD) system. Doped mu-Si layers hav......

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