Fast and accurate: high-speed metrological large-range AFM for surface and nanometrology

Dai, GL; Koenders, L; Fluegge, J; Hemmleb, M

Dai, GL (reprint author), PTB, D-38116 Braunschweig, Germany.

MEASUREMENT SCIENCE AND TECHNOLOGY, 2018; 29 (5):

Abstract

Low measurement speed remains a major shortcoming of the scanning probe microscopic technique. It not only leads to a low measurement throughput, but ......

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