Fabrication and Characterization of Capacitive RF MEMS Perforated Switch

Rao, KS; Thalluri, LN; Guha, K; Sravani, KG

Rao, KS (reprint author), Deemed Univ, Koneru Lakshmaih Educ Fdn, Dept Elect & Commun Engn, MEMS Res Ctr, Guntur 522502, India.

IEEE ACCESS, 2018; 6 (): 77519

Abstract

In this paper, we have designed, simulated, fabricated, and characterized a clamped-clamped micro mechanical structure-based shunt capacitive RF MEMS ......

Full Text Link