In-depth analysis of electrical characteristics for polycrystalline silicon vertical thin film transistors

Zhang, P; Jacques, E; Rogel, R; Pichon, L; Bonnaud, O

Zhang, P (corresponding author), Nanjing Univ Posts & Telecommun, Coll Elect & Opt Engn, Nanjing 210023, Peoples R China.; Zhang, P (corresponding author), Nanjing Univ Posts & Telecommun, Coll Microelect, Nanjing 210023, Peoples R China.

SOLID-STATE ELECTRONICS, 2021; 178 ():

Abstract

A polycrystalline silicon vertical thin film transistor (VTFT) is fabricated, and the electrical parameters are extracted and compared with the typica......

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