Integration of 650 V GaN Power ICs on 200 mm Engineered Substrates

Li, XD; Geens, K; Wellekens, D; Zhao, M; Magnani, A; Amirifar, N; Bakeroot, B; You, SZ; Fahle, D; Hahn, H; Heuken, M; Odnoblyudov, V; Aktas, O; Basceri, C; Marcon, D; Groeseneken, G; Decoutere, S

Li, XD (corresponding author), IMEC, B-3001 Leuven, Belgium.

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 2020; 33 (4): 534

Abstract

GaN power ICs on engineered substrates of Qromis substrate technology (QST) are promising for future power applications, thanks to the reduced parasit......

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