Novel fabrication of extremely high aspect ratio and straight nanogap and array nanogap electrodes

Hashemi, MM; Nikfarjam, A; Raji, H

Nikfarjam, A (reprint author), Univ Tehran, Fac New Sci & Technol, MEMS & NEMS Lab, POB 14395-1561, Tehran, Iran.

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2019; 25 (2): 541

Abstract

We reported a reproducible, simple and novel method for fabricating electrodes with high aspect ratio and highly straight nanometer size gap. The gap ......

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