True 3D-AFM sensor for nanometrology

Thiesler, J; Tutsch, R; Fromm, K; Dai, GL

Thiesler, J (corresponding author), Phys Tech Bundesanstalt PTB, Bundesallee 100, D-38116 Braunschweig, Germany.

MEASUREMENT SCIENCE AND TECHNOLOGY, 2020; 31 (7):

Abstract

A new three dimensional (3D) atomic force microscopic (AFM) probe, referred to as the 3D-Nanoprobe, is introduced. The 3D-Nanoprobe is realized by int......

Full Text Link


Links

期刊讨论 | 中国SCI论文 | 期刊主页 | 投稿经验 | 杂志官网 | 投稿链接 | 作者需知 | PMC链接 | Pubmed全文检索