Fabrication and test of RF MEMS in LTCC technology

Lucibello, A; Marcelli, R; Di Paola, E; Di Nardo, S; Pochesci, D; Croci, R; Germani, C

Marcelli, R (reprint author), CNR IMM Roma, Inst Microelect & Microsyst, Via Fosso del Cavaliere 100, I-00133 Rome, Italy.

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2018; 24 (1): 511

Abstract

RF MEMS in low-temperature co-fired ceramics (LTCC) technology have been designed, manufactured and tested for potential utilization in reconfigurable......

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