Integrated Double-Sided Random Microlens Array Used for Laser Beam Homogenization

Yuan, W; Xu, C; Xue, L; Pang, H; Cao, AX; Fu, YQ; Deng, QL

Fu, YQ (corresponding author), Univ Elect Sci & Technol China, Sch Phys, Chengdu 610054, Peoples R China.; Cao, AX (corresponding author), Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China.

MICROMACHINES, 2021; 12 (6):

Abstract

Double microlens arrays (MLAs) in series can be used to divide and superpose laser beam so as to achieve a homogenized spot. However, for laser beam h......

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