Comparative study on the dynamics and the composition between a pulsed laser deposition (PLD) and a plasma enhanced PLD (PE-PLD)

Escalona, M; Bhuyan, H; Valenzuela, JC; Ibacache, S; Wyndham, E; Favre, M; Veloso, F; Ruiz, HM; Wagenaars, E

Bhuyan, H (corresponding author), Pontificia Univ Catolica Chile, Inst Phys, Ave Vicuna Mackenna 4860, Santiago, Chile.

RESULTS IN PHYSICS, 2021; 24 ():

Abstract

We report the effect of single and dual radio frequency (RF) plasma discharge on the composition and dynamics of a titanium plasma plume produced in a......

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