Sputtering of Mo and Al in D-2/N-2 plasma cleaning discharge

Bukhovets, VL; Gorodetsky, AE; Zalavutdinov, RK; Markin, AV; Kazansky, LP; Arkhipushkin, IA; Zakharov, AP; Dmitriev, AM; Razdobarin, AG; Mukhin, EE

Bukhovets, VL (reprint author), Russian Acad Sci, Frumkin Inst Phys Chem & Electrochem, 31 Leninsky Prospect, Moscow 119071, Russia.

NUCLEAR MATERIALS AND ENERGY, 2017; 12 ( ): 458

Abstract

Sputtering of Mo and Al (as Be proxy) in mixed D-2/N-2 DC glow discharge was studied in view of the first mirror performance. The composition of the w......

Full Text Link


Links

期刊讨论 | 中国SCI论文 | 期刊主页 | 投稿经验 | 杂志官网 | 投稿链接 | 作者需知 | PMC链接 | Pubmed全文检索