Pile-Ups Formation in AFM-Based Nanolithography: Morpho-Mechanical Characterization and Removal Strategies

Pellegrino, P; Farella, I; Cascione, M; De Matteis, V; Bramanti, AP; Vincenti, L; Della Torre, A; Quaranta, F; Rinaldi, R

Pellegrino, P; Cascione, M (通讯作者)，Univ Salento, Dept Math & Phys Ennio Giorgi, Via Monteroni, I-73100 Lecce, Italy.

MICROMACHINES, 2022; 13 (11):

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