Optimization of ALD-ZnO Thin Films Toward Higher Conductivity

Beh, H; Hiller, D; Zacharias, M

Beh, H (reprint author), Albert Ludwigs Univ Freiburg, Fac Engn, IMTEK, Georges Kohler Allee 103, D-79110 Freiburg, Germany.

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2018; 215 (16):

Abstract

Zinc oxide (ZnO) fabricated by atomic layer deposition (ALD) is a promising material to replace tin-doped indium oxide (ITO) as standard transparent c......

Full Text Link