Metrology and characterization of SU-8 microstructures using autofluorescence emission

Ramkumar, PK; Rountree, CM; Saggere, L; Finan, JD

Finan, JD (corresponding author), Univ Illinois, Dept Mech & Ind Engn, Chicago, IL 60607 USA.

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2021; 31 (4):

Abstract

Sophisticated three-dimensional microstructures fabricated using the negative tone SU-8 photoresist are used in many biomedical and microfluidic appli......

Full Text Link


Links

期刊讨论 | 中国SCI论文 | 期刊主页 | 投稿经验 | 杂志官网 | 投稿链接 | 作者需知 | PMC链接 | Pubmed全文检索