Effects of cavity shapes and rounded corners of mold on polymer filling process in nanoimprint lithography

Ma, LJ; Zhang, MY; Zhang, XL; Zheng, X; Xue, SF; Wang, Q

Wang, Q (corresponding author), Shandong Univ Sci & Technol, Inst NanoEngn, Coll Civil Engn & Architecture, Qingdao 266590, Peoples R China.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2020; 38 (6):

Abstract

The effects of cavity shapes and rounded corners on polymer filling and mold stress distributions of nanoimprint lithography are investigated using a ......

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