Development of hydrogen-free fully amorphous silicon oxycarbide coating by thermal organometallic chemical vapor deposition technique-MedSci.cn

Development of hydrogen-free fully amorphous silicon oxycarbide coating by thermal organometallic chemical vapor deposition technique

Liu, HS; Tariq, NU; Han, RF; Liu, HH; Cui, XY; Tang, MQ; Xiong, TY

Tang, MQ; Xiong, TY (通讯作者)，Chinese Acad Sci, Shi Changxu Innovat Ctr Adv Mat, Inst Met Res, Shenyang 110016, Peoples R China.

JOURNAL OF NON-CRYSTALLINE SOLIDS, 2022; 575 ():

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