Controlling of Polarity on the Surface Passivation Mechanism of Al2O3 for Black Silicon by CLD

Zhang, BY; Wang, YJ; Han, L; Li, YX; Liu, AM

Zhang, BY (reprint author), Dalian Univ Technol, Sch Phys, Dalian 116023, Peoples R China.

JOURNAL OF NANO RESEARCH, 2017; 49 ( ): 18

Abstract

Thin Al2O3 films were deposited on p-type black silicon (b-Si) by using chemical liquid phase deposition (CLD) technique. The influence of annealing t......

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