A Collaborative Scheduling Strategy for Twin Fab

She, HD; Yu, QY; Min, ZH; Li, L

Li, L (reprint author), Tongji Univ, Coll Elect & Informat Engn, Shanghai, Peoples R China.

2017 13TH IEEE CONFERENCE ON AUTOMATION SCIENCE AND ENGINEERING (CASE), 2017; ( ): 723

Abstract

This paper proposes a collaborative scheduling strategy for twin fab in semiconductor manufacturing, which consists of the job scheduling strategy and......

Full Text Link