Effect of substrate temperature and annealing on the growth of TiO2-x thin films deposited by using DC-magnetron sputtering technique

Jana, S; Debnath, AK; Putta, V; Bahadur, J; Kishor, J; Chauhan, AK; Bhattacharya, D

Jana, S (通讯作者)，Bhabha Atom Res Ctr, Solid State Phys Div, Mumbai 400085, India.

SURFACE AND INTERFACE ANALYSIS, 2023; ():

Abstract

In this study, the effect of annealing on the structural, surface morphology and chemical structure of titanium suboxide (TiO2-x) thin films has been ......

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