Laser heat-mode patterning with improved aspect-ratio

Zhang, K; Wang, ZW; Chen, GD; Zheng, JL; Mo, ZC; Wang, Y; Wei, JS

Wei, JS (corresponding author), Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Lab Micronano Optoelect Mat & Devices, Shanghai 201800, Peoples R China.; Wang, Y (corresponding author), Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China.

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2021; 134 ():