The Design, Simulation and Fabrication of an Omnidirectional Inertial Switch with Rectangular Suspension Spring

Chen, WG; Wang, R; Wang, HY; Sun, SL

Chen, WG (corresponding author), Qujing Normal Univ, Coll Informat Engn, Qujing 655000, Peoples R China.

MICROMACHINES, 2021; 12 (4):

Abstract

An omnidirectional inertial switch with rectangular spring is proposed in this paper, and the prototype has been fabricated by surface micromachining ......

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