Compact Intrinsically Switchable FBAR Filters Utilizing Ferroelectric BST

Koohi, MZ; Lee, S; Mortazawi, A

Koohi, MZ (reprint author), Univ Michigan, Elect Engn & Comp Sci Dept, Ann Arbor, MI 48109 USA.

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2018; 65 (8): 1468

Abstract

Intrinsically switchable thin film bulk acoustic resonator (FBAR) filters based on ferroelectric barium strontium titanate (BST) are presented. A 1.5-......

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