Thin Film Optical Elements in Extreme Ultraviolet and Vacuum Ultraviolet

Qi, RZ; Zhang, JL; Wu, JL; Li, SY; Huang, QS; Zhang, Z; Wang, ZS

Wang, ZS (通讯作者)，Tongji Univ, Sch Phys Sci & Engn, Inst Precis Opt Engn, Key Lab Adv Microstruct Mat,Minist Educ, Shanghai 200092, Peoples R China.

ACTA OPTICA SINICA, 2022; 42 (11):

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