Si measurements: SiOx on Si

Kalem, S; Tekin, SB; Kaya, ZE; Hannas, AE; Sunstrom, V

Kalem, S (reprint author), TUBITAK BILGEM, Informat & Informat Secur Res Ctr, Gebze, Kocaeli, Turkey.

2017 JOINT INTERNATIONAL EUROSOI WORKSHOP AND INTERNATIONAL CONFERENCE ON ULTIMATE INTEGRATION ON SILICON (EUROSOI-ULIS 2017), 2017; ( ): 235

Abstract

We review the results of silicon measurements, which we have performed on suboxide SiOx formed on n and p type Si wafers with different surface textur......

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