MEMS hydrogen gas sensor with wireless quartz crystal resonator

Zhou, LJ; Kato, F; Nakamura, N; Oshikane, Y; Nagakubo, A; Ogi, H

Ogi, H (corresponding author), Osaka Univ, Grad Sch Engn, Yamadaoka 2-1, Suita, Osaka 5650871, Japan.

SENSORS AND ACTUATORS B-CHEMICAL, 2021; 334 ():

Abstract

A highly sensitive hydrogen-gas sensor fabricated using MEMS technology is presented. The sensor chip consists of glass substrates, silicon substrate,......

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