Ammonia Free Cleaning Solution for Post-CMP Cleaning (Chemical Mechanical Polishing)

Asyraf, M; Termizi, A; Ariff, M; Din, AT

Asyraf, M (corresponding author), SilTerra Malaysia, Kulim Hitech Pk, Kedah, Malaysia.

INTERNATIONAL JOURNAL OF NANOELECTRONICS AND MATERIALS, 2020; 13 (3): 577

Abstract

Ammoniacal nitrogen is one of the new parameters incorporated under the Industrial Effluents Regulation in Environmental Quality Act (EQA) starting fr......

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