Sub-30 nm patterning of molecular resists based on crosslinking through tip based oxidation

Lorenzoni, M; Wagner, D; Neuber, C; Schmidt, HW; Perez-Murano, F

Lorenzoni, M (reprint author), CSIC, CNM, IMB, Campus UAB, Barcelona 08193, Spain.

APPLIED SURFACE SCIENCE, 2018; 442 (): 106

Abstract

Oxidation Scanning Probe Lithography (o-SPL) is an established method employed for device patterning at the nanometer scale. It represents a feasible ......

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