MOCVD surface preparation of V-groove Si for III-V growth-MedSci.cn

MOCVD surface preparation of V-groove Si for III-V growth

Saenz, TE; Nandy, M; Paszuk, A; Ostheimer, D; Koch, J; McMahon, WE; Zimmerman, JD; Hannappel, T; Warren, EL

Warren, EL (通讯作者)，Natl Renewable Energy Lab, Golden, CO 80401 USA.

JOURNAL OF CRYSTAL GROWTH, 2022; 597 ():

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