A Method to Improve SST Flash Cell Program Function

Huang, C; Zhang, PZ; Qin, HY; Zhou, Y

Huang, C (reprint author), Shanghai Huahong Grace Semicond Mfg Corp, Dept Proc Integrat, Shanghai 201203, Peoples R China.

2019 CHINA SEMICONDUCTOR TECHNOLOGY INTERNATIONAL CONFERENCE (CSTIC), 2019; ():

Abstract

For SST flash, the FG (Floating Gate) coupling voltage will impact the cell program and erase function. In this paper, we introduced isotropic etching......

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